Flexible SiO2 cantilevers for torsional self-aligning micro scale four-point probes

Daniel Kjær, Lauge Gammelgaard, Peter Bøggild, Ole Hansen, Peter Rasmus Ebsen Petersen, J. E. Hansen

Research output: Contribution to journalJournal articleResearchpeer-review


In order to successfully measure the conductivity of a sample with a four- point probe, good alignment of the electrodes to the sample is important to establish even contact pressure and contact areas of the electrodes. By incorporating a hinge in a microfabricated SiO2 mono- cantilever the ability to compensate for misalignment is improved at a cost of reduced spring constant. Analytical calculations, numerical simulations on cantilever deflection and comparison with experimental results indicate that a reasonable compromise between torsional flexibility and overall spring constant can be achieved by proper dimensioning and placement of the hinge. Furthermore, it is shown that polymeric macro scale cantilever models can provide a fast and reliable understanding of the mechanical deflection properties of microfabricated SiO2 cantilevers.
Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Pages (from-to)1910-1915
Publication statusPublished - 2007

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