Flexible silicon substrates with Cu leads and BCB dielectric

Torben Lisby, Ole Hansen, J. Branebjerg

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Eurosensors XVI
    Publication date2002
    Pages153-154
    Publication statusPublished - 2002

    Cite this

    Lisby, T., Hansen, O., & Branebjerg, J. (2002). Flexible silicon substrates with Cu leads and BCB dielectric. In Proceedings of Eurosensors XVI (pp. 153-154)