Flexible silicon substrates with Cu leads and BCB dielectric

Torben Lisby, Ole Hansen, J. Branebjerg

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Eurosensors XVI
    Publication date2002
    Pages153-154
    Publication statusPublished - 2002

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