FISH & CHIPS: Single Chip Silicon MEMS CTDL Salinity, Temperature, Pressure and Light sensor for use in fisheries research

Anders Hyldgård, Ole Hansen, Erik Vilain Thomsen

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Abstract

A single-chip silicon MEMS CTDL multi sensor for use in aqueous environments is presented. The new sensor chip consists of a conductivity sensor based on platinum electrodes (C), an ion-implanted thermistor temperature sensor (T), a piezoresistive pressure sensor (D for depth/pressure) and an ion-implanted p-n junction light sensor (L). The design and fabrication process is described. A temperature sensitivity of 0.8 × 10-3K-1 has been measured and detailed analysis of conductivity measurement data shows a cell constant of 81 cm-1.
Original languageEnglish
Title of host publicationProceedings of MEMS 2005
PublisherIEEE
Publication date2005
Pages303-306
ISBN (Print)0-7803-8732-5
DOIs
Publication statusPublished - 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems - Miami Beach, FL, United States
Duration: 30 Jan 20053 Feb 2005
Conference number: 18

Conference

Conference18th IEEE International Conference on Micro Electro Mechanical Systems
Number18
CountryUnited States
CityMiami Beach, FL
Period30/01/200503/02/2005

Bibliographical note

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