FISH & CHIPS: Single Chip Silicon MEMS CTDL Salinity, Temperature, Pressure and Light sensor for use in fisheries research

Anders Hyldgård; Ole Hansen; Erik Vilain Thomsen

doi:10.1109/MEMSYS.2005.1453927

FISH & CHIPS: Single Chip Silicon MEMS CTDL Salinity, Temperature, Pressure and Light sensor for use in fisheries research

Anders Hyldgård, Ole Hansen, Erik Vilain Thomsen

Center for Individual Nanoparticle Functionality

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

A single-chip silicon MEMS CTDL multi sensor for use in aqueous environments is presented. The new sensor chip consists of a conductivity sensor based on platinum electrodes (C), an ion-implanted thermistor temperature sensor (T), a piezoresistive pressure sensor (D for depth/pressure) and an ion-implanted p-n junction light sensor (L). The design and fabrication process is described. A temperature sensitivity of 0.8 × 10-3K-1 has been measured and detailed analysis of conductivity measurement data shows a cell constant of 81 cm-1.

Original language	English
Title of host publication	Proceedings of MEMS 2005
Publisher	IEEE
Publication date	2005
Pages	303-306
ISBN (Print)	0-7803-8732-5
DOIs	https://doi.org/10.1109/MEMSYS.2005.1453927
Publication status	Published - 2005
Event	18th IEEE International Conference on Micro Electro Mechanical Systems - Miami Beach, FL, United States Duration: 30 Jan 2005 → 3 Feb 2005 Conference number: 18

Conference

Conference	18th IEEE International Conference on Micro Electro Mechanical Systems
Number	18
Country/Territory	United States
City	Miami Beach, FL
Period	30/01/2005 → 03/02/2005

Bibliographical note

Copyright: 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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@inproceedings{b3371509c8be4b2ba6e53254763b1b41,

title = "FISH & CHIPS: Single Chip Silicon MEMS CTDL Salinity, Temperature, Pressure and Light sensor for use in fisheries research",

abstract = "A single-chip silicon MEMS CTDL multi sensor for use in aqueous environments is presented. The new sensor chip consists of a conductivity sensor based on platinum electrodes (C), an ion-implanted thermistor temperature sensor (T), a piezoresistive pressure sensor (D for depth/pressure) and an ion-implanted p-n junction light sensor (L). The design and fabrication process is described. A temperature sensitivity of 0.8 × 10-3K-1 has been measured and detailed analysis of conductivity measurement data shows a cell constant of 81 cm-1.",

author = "Anders Hyldg{\aa}rd and Ole Hansen and Thomsen, {Erik Vilain}",

note = "Copyright: 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 18th IEEE International Conference on Micro Electro Mechanical Systems , MEMS 2005 ; Conference date: 30-01-2005 Through 03-02-2005",

year = "2005",

doi = "10.1109/MEMSYS.2005.1453927",

language = "English",

isbn = "0-7803-8732-5",

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booktitle = "Proceedings of MEMS 2005",

publisher = "IEEE",

address = "United States",

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Hyldgård, A, Hansen, O & Thomsen, EV 2005, FISH & CHIPS: Single Chip Silicon MEMS CTDL Salinity, Temperature, Pressure and Light sensor for use in fisheries research. in Proceedings of MEMS 2005. IEEE, pp. 303-306, 18th IEEE International Conference on Micro Electro Mechanical Systems , Miami Beach, FL, United States, 30/01/2005. https://doi.org/10.1109/MEMSYS.2005.1453927

TY - GEN

T1 - FISH & CHIPS: Single Chip Silicon MEMS CTDL Salinity, Temperature, Pressure and Light sensor for use in fisheries research

AU - Hyldgård, Anders

AU - Hansen, Ole

AU - Thomsen, Erik Vilain

N1 - Conference code: 18

PY - 2005

Y1 - 2005

N2 - A single-chip silicon MEMS CTDL multi sensor for use in aqueous environments is presented. The new sensor chip consists of a conductivity sensor based on platinum electrodes (C), an ion-implanted thermistor temperature sensor (T), a piezoresistive pressure sensor (D for depth/pressure) and an ion-implanted p-n junction light sensor (L). The design and fabrication process is described. A temperature sensitivity of 0.8 × 10-3K-1 has been measured and detailed analysis of conductivity measurement data shows a cell constant of 81 cm-1.

AB - A single-chip silicon MEMS CTDL multi sensor for use in aqueous environments is presented. The new sensor chip consists of a conductivity sensor based on platinum electrodes (C), an ion-implanted thermistor temperature sensor (T), a piezoresistive pressure sensor (D for depth/pressure) and an ion-implanted p-n junction light sensor (L). The design and fabrication process is described. A temperature sensitivity of 0.8 × 10-3K-1 has been measured and detailed analysis of conductivity measurement data shows a cell constant of 81 cm-1.

U2 - 10.1109/MEMSYS.2005.1453927

DO - 10.1109/MEMSYS.2005.1453927

M3 - Article in proceedings

SN - 0-7803-8732-5

SP - 303

EP - 306

BT - Proceedings of MEMS 2005

PB - IEEE

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 30 January 2005 through 3 February 2005

ER -

FISH & CHIPS: Single Chip Silicon MEMS CTDL Salinity, Temperature, Pressure and Light sensor for use in fisheries research

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