Abstract
The design and fabrication of a single chip silicon salinity, temperature, pressure and light multisensor is presented. The behavior 2- and 4-electrode conductivity microsensors are described and methods for precise determination of water conductivity are given
Original language | English |
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Title of host publication | Proceedings of IEEE sensors 2005 |
Publisher | IEEE |
Publication date | 2005 |
ISBN (Print) | 0-7803-9056-3 |
DOIs | |
Publication status | Published - 2005 |
Event | IEEE Sensors 2005 - Irvine, United States Duration: 31 Oct 2005 → 3 Nov 2005 Conference number: 4 https://ieeexplore.ieee.org/xpl/conhome/10646/proceeding |
Conference
Conference | IEEE Sensors 2005 |
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Number | 4 |
Country/Territory | United States |
City | Irvine |
Period | 31/10/2005 → 03/11/2005 |
Internet address |