Abstract
Modal and discrete focusing effects associated with three-dimensional plasma-sheath-lenses show
promising potential for applications in ion beam extraction, mass spectrometry, plasma diagnostics
and for basic studies of plasma sheath. The ion focusing properties can be adjusted by controlling
the geometrical structure of the plasma-sheath-lens and plasma parameters. The positive and negative
ion kinetics within the plasma-sheath-lens are investigated both experimentally and theoretically
and a modal focusing ring is identified on the surface of disk electrodes. The focusing ring is
very sensitive to the sheath thickness and can be used to monitor very small changes in plasma parameters.
Three dimensional simulations are found to be in very good agreement with experiments.
Original language | English |
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Article number | 094106 |
Journal | Applied Physics Letters |
Volume | 107 |
Issue number | 9 |
Number of pages | 4 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 2015 |