Ferromagnetic shadow mask for spray coating of polymer patterns

Stephan Sylvest Keller; Filippo Bosco; Anja Boisen

doi:10.1016/j.mee.2013.03.029

Ferromagnetic shadow mask for spray coating of polymer patterns

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

We present the fabrication of a wafer-scale shadow mask with arrays of circular holes with diameters of 150–400 μm. Standard UV photolithography is used to define 700 μm thick SU-8 structures followed by electroplating of nickel and etching of the template. The ferromagnetic properties of the shadow mask allow magnetic clamping to the substrate and spray coating of well defined polymer patterns.

Original language	English
Journal	Microelectronic Engineering
Volume	110
Pages (from-to)	427-431
ISSN	0167-9317
DOIs	https://doi.org/10.1016/j.mee.2013.03.029
Publication status	Published - 2013

Keywords

Spray coating
Nickel electroplating
Magnetic clamping
Eudragit
Polymer patterning

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@article{edcc48b40ecb4e04816c55cdb5a91d39,

title = "Ferromagnetic shadow mask for spray coating of polymer patterns",

abstract = "We present the fabrication of a wafer-scale shadow mask with arrays of circular holes with diameters of 150{\textendash}400 μm. Standard UV photolithography is used to define 700 μm thick SU-8 structures followed by electroplating of nickel and etching of the template. The ferromagnetic properties of the shadow mask allow magnetic clamping to the substrate and spray coating of well defined polymer patterns.",

keywords = "Spray coating, Nickel electroplating, Magnetic clamping, Eudragit, Polymer patterning",

author = "Keller, \{Stephan Sylvest\} and Filippo Bosco and Anja Boisen",

year = "2013",

doi = "10.1016/j.mee.2013.03.029",

language = "English",

volume = "110",

pages = "427--431",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

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TY - JOUR

T1 - Ferromagnetic shadow mask for spray coating of polymer patterns

AU - Keller, Stephan Sylvest

AU - Bosco, Filippo

AU - Boisen, Anja

PY - 2013

Y1 - 2013

N2 - We present the fabrication of a wafer-scale shadow mask with arrays of circular holes with diameters of 150–400 μm. Standard UV photolithography is used to define 700 μm thick SU-8 structures followed by electroplating of nickel and etching of the template. The ferromagnetic properties of the shadow mask allow magnetic clamping to the substrate and spray coating of well defined polymer patterns.

AB - We present the fabrication of a wafer-scale shadow mask with arrays of circular holes with diameters of 150–400 μm. Standard UV photolithography is used to define 700 μm thick SU-8 structures followed by electroplating of nickel and etching of the template. The ferromagnetic properties of the shadow mask allow magnetic clamping to the substrate and spray coating of well defined polymer patterns.

KW - Spray coating

KW - Nickel electroplating

KW - Magnetic clamping

KW - Eudragit

KW - Polymer patterning

U2 - 10.1016/j.mee.2013.03.029

DO - 10.1016/j.mee.2013.03.029

M3 - Journal article

SN - 0167-9317

VL - 110

SP - 427

EP - 431

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Ferromagnetic shadow mask for spray coating of polymer patterns

Abstract

Keywords

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