Ferromagnetic shadow mask for spray coating of polymer patterns

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    We present the fabrication of a wafer-scale shadow mask with arrays of circular holes with diameters of 150–400 μm. Standard UV photolithography is used to define 700 μm thick SU-8 structures followed by electroplating of nickel and etching of the template. The ferromagnetic properties of the shadow mask allow magnetic clamping to the substrate and spray coating of well defined polymer patterns.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume110
    Pages (from-to)427-431
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2013

    Keywords

    • Spray coating
    • Nickel electroplating
    • Magnetic clamping
    • Eudragit
    • Polymer patterning

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