Fast-writing E-beam for large arrays of nano-holes

Emil Højlund-Nielsen; Jeppe Sandvik Clausen; Alexander Bruun Christiansen; Tine Greibe; N. Asger Mortensen; Anders Kristensen

Fast-writing E-beam for large arrays of nano-holes

Emil Højlund-Nielsen, Jeppe Sandvik Clausen, Alexander Bruun Christiansen, Tine Greibe, N. Asger Mortensen, Anders Kristensen

Research output: Contribution to conference › Poster › Research › peer-review

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Original language	English
Publication date	2013
Number of pages	1
Publication status	Published - 2013
Event	39th International Conference on Micro and Nano Engineering - London, United Kingdom Duration: 16 Sept 2013 → 19 Sept 2013 Conference number: 39th

Conference

Conference	39th International Conference on Micro and Nano Engineering
Number	39th
Country/Territory	United Kingdom
City	London
Period	16/09/2013 → 19/09/2013

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@conference{4393196bee6f40f9bf339829c9eb3799,

title = "Fast-writing E-beam for large arrays of nano-holes",

author = "Emil H{\o}jlund-Nielsen and Clausen, {Jeppe Sandvik} and Christiansen, {Alexander Bruun} and Tine Greibe and Mortensen, {N. Asger} and Anders Kristensen",

year = "2013",

language = "English",

note = "39th International Conference on Micro and Nano Engineering, mne ; Conference date: 16-09-2013 Through 19-09-2013",

}

TY - CONF

T1 - Fast-writing E-beam for large arrays of nano-holes

AU - Højlund-Nielsen, Emil

AU - Clausen, Jeppe Sandvik

AU - Christiansen, Alexander Bruun

AU - Greibe, Tine

AU - Mortensen, N. Asger

AU - Kristensen, Anders

N1 - Conference code: 39th

PY - 2013

Y1 - 2013

M3 - Poster

T2 - 39th International Conference on Micro and Nano Engineering

Y2 - 16 September 2013 through 19 September 2013

ER -