Fast three-dimensional laser micromachining of silicon for microsystems

Matthias Mullenborn, Paul Andreas Holger Dirac, Jon Wulff Petersen, Siebe Bouwstra

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalSensors and Actuators A: Physical
    Volume52
    Pages (from-to)121-125
    ISSN0924-4247
    Publication statusPublished - 1996

    Cite this

    Mullenborn, M., Dirac, P. A. H., Petersen, J. W., & Bouwstra, S. (1996). Fast three-dimensional laser micromachining of silicon for microsystems. Sensors and Actuators A: Physical, 52, 121-125.