Fast three-dimensional laser micromachining of silicon for microsystems

Matthias Mullenborn, Paul Andreas Holger Dirac, Jon Wulff Petersen, Siebe Bouwstra

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalSensors and Actuators A: Physical
    Volume52
    Pages (from-to)121-125
    ISSN0924-4247
    Publication statusPublished - 1996

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