Fast thermal nanoimprint lithography by a stamp with integrated heater

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationMNE 33rd International Conference on Micro- and Nano-Engineering
Publication date2007
Pages117-118
Publication statusPublished - 2007
Event33rd International Conference on Micro- and Nano-Engineering - Copenhagen, Denmark
Duration: 23 Sep 200726 Sep 2007
Conference number: 33
http://www.mne07.org/

Conference

Conference33rd International Conference on Micro- and Nano-Engineering
Number33
CountryDenmark
CityCopenhagen
Period23/09/200726/09/2007
Internet address

Cite this