Fast prototyping of conducting polymer microelectrodes using resistance-controlled high precision drilling

Jan Robert Kafka, Oliver Geschke, Steen Skaarup, Niels Bent Larsen

Research output: Contribution to journalConference articleResearchpeer-review


We present a straightforward method for fast prototyping of microelectrode arrays in the highly conductive polymer poly(3,4-ethylenedioxythiophene) (PEDOT). Microelectrode arrays were produced by electrical resistance-controlled microdrilling through an insulating polymer layer (TOPAS® 5013) covering a PEDOT layer. The sudden drop in electrical resistance between the metal drill and the PEDOT layer upon physical contact was employed as stop criterion for the drilling process. Arrays of 3×3 microelectrodes of diameter 30μm or 100μm, respectively, and having center-to-center electrode spacings of 130μm and 300μm, respectively, were fabricated. Their functionality was verified by chronoamperometry on potassium ferro-/ferricyanide. Comparison of the experimentally obtained results to finite element modeling of the respective electrode configurations shows that the conducting polymer electrodes approach the steady state currents predicted from modeling, but at a much slower rate than expected. This is shown to be caused by the use of electroactive PEDOT electrodes. Subtraction of the latter contribution gives approach to steady state currents within a few seconds, which is in very good agreement with the modeled response time.
Original languageEnglish
JournalMicroelectronic Engineering
Issue number8
Pages (from-to)2589-2592
Publication statusPublished - 2011
Event36th International Conference on Micro- and Nano-Engineering - Genoa, Italy
Duration: 19 Sept 201022 Sept 2010
Conference number: 36


Conference36th International Conference on Micro- and Nano-Engineering
Internet address


  • Microelectrode array
  • Polymer
  • Finite element modeling
  • Polymer fast prototyping
  • Microdrilling


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