Fast cross section reconstruction for metallic sub-micron wires on a substrate

Mirza Karamehmedovic, P.-E. Hansen, Emir Karamehmedovic, Thomas Wriedt

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Abstract

We present a fast, Kirsch-Kress type numerical inversion method for shape reconstruction of metallic sub-micron wires/rods on substrates. For increased speed of inversion, the numerical integration occurring in the forward scattering model, the far-field matching and the half-space Green's function is simplified: the surface current densities in the radiation integrals are approximated by spatially impulsive sources, matching of the sources with the measured scattered far field is done at discrete testing points, and finally, the half-space Green's function, accounting for the presence of the substrate, is approximated using Fresnel reflection and complex image theory. The wires/rods to be reconstructed are modeled using the Surface Impedance Boundary Condition (SIBC). We apply the inversion method to experimental angular-resolved bistatic scatterometric data (BRDF), measured at the Danish Fundamental Metrology using a 325 nm He-Cd laser. The cross-sections of three platinum (Pt) sub-micron wires on silicon (Si) substrate are estimated from the far-field BRDF data. In addition, we present an analysis of the accuracy and efficiency of the inversion for families of circular perfectly electrically conducting and silver (Ag) submicron wires on Si substrate, using numerically simulated measurement data.
Original languageEnglish
Publication date2012
Publication statusPublished - 2012
Externally publishedYes
EventE-MRS 2012 Spring Meeting - Strasbourg, France
Duration: 14 May 201218 May 2012

Conference

ConferenceE-MRS 2012 Spring Meeting
CountryFrance
CityStrasbourg
Period14/05/201218/05/2012

Cite this

Karamehmedovic, M., Hansen, P-E., Karamehmedovic, E., & Wriedt, T. (2012). Fast cross section reconstruction for metallic sub-micron wires on a substrate. Abstract from E-MRS 2012 Spring Meeting, Strasbourg, France.
Karamehmedovic, Mirza ; Hansen, P.-E. ; Karamehmedovic, Emir ; Wriedt, Thomas. / Fast cross section reconstruction for metallic sub-micron wires on a substrate. Abstract from E-MRS 2012 Spring Meeting, Strasbourg, France.
@conference{ea56ce13e91e4e4a82debe47735a7c7b,
title = "Fast cross section reconstruction for metallic sub-micron wires on a substrate",
abstract = "We present a fast, Kirsch-Kress type numerical inversion method for shape reconstruction of metallic sub-micron wires/rods on substrates. For increased speed of inversion, the numerical integration occurring in the forward scattering model, the far-field matching and the half-space Green's function is simplified: the surface current densities in the radiation integrals are approximated by spatially impulsive sources, matching of the sources with the measured scattered far field is done at discrete testing points, and finally, the half-space Green's function, accounting for the presence of the substrate, is approximated using Fresnel reflection and complex image theory. The wires/rods to be reconstructed are modeled using the Surface Impedance Boundary Condition (SIBC). We apply the inversion method to experimental angular-resolved bistatic scatterometric data (BRDF), measured at the Danish Fundamental Metrology using a 325 nm He-Cd laser. The cross-sections of three platinum (Pt) sub-micron wires on silicon (Si) substrate are estimated from the far-field BRDF data. In addition, we present an analysis of the accuracy and efficiency of the inversion for families of circular perfectly electrically conducting and silver (Ag) submicron wires on Si substrate, using numerically simulated measurement data.",
author = "Mirza Karamehmedovic and P.-E. Hansen and Emir Karamehmedovic and Thomas Wriedt",
year = "2012",
language = "English",
note = "E-MRS 2012 Spring Meeting ; Conference date: 14-05-2012 Through 18-05-2012",

}

Karamehmedovic, M, Hansen, P-E, Karamehmedovic, E & Wriedt, T 2012, 'Fast cross section reconstruction for metallic sub-micron wires on a substrate' E-MRS 2012 Spring Meeting, Strasbourg, France, 14/05/2012 - 18/05/2012, .

Fast cross section reconstruction for metallic sub-micron wires on a substrate. / Karamehmedovic, Mirza; Hansen, P.-E.; Karamehmedovic, Emir; Wriedt, Thomas.

2012. Abstract from E-MRS 2012 Spring Meeting, Strasbourg, France.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

TY - ABST

T1 - Fast cross section reconstruction for metallic sub-micron wires on a substrate

AU - Karamehmedovic, Mirza

AU - Hansen, P.-E.

AU - Karamehmedovic, Emir

AU - Wriedt, Thomas

PY - 2012

Y1 - 2012

N2 - We present a fast, Kirsch-Kress type numerical inversion method for shape reconstruction of metallic sub-micron wires/rods on substrates. For increased speed of inversion, the numerical integration occurring in the forward scattering model, the far-field matching and the half-space Green's function is simplified: the surface current densities in the radiation integrals are approximated by spatially impulsive sources, matching of the sources with the measured scattered far field is done at discrete testing points, and finally, the half-space Green's function, accounting for the presence of the substrate, is approximated using Fresnel reflection and complex image theory. The wires/rods to be reconstructed are modeled using the Surface Impedance Boundary Condition (SIBC). We apply the inversion method to experimental angular-resolved bistatic scatterometric data (BRDF), measured at the Danish Fundamental Metrology using a 325 nm He-Cd laser. The cross-sections of three platinum (Pt) sub-micron wires on silicon (Si) substrate are estimated from the far-field BRDF data. In addition, we present an analysis of the accuracy and efficiency of the inversion for families of circular perfectly electrically conducting and silver (Ag) submicron wires on Si substrate, using numerically simulated measurement data.

AB - We present a fast, Kirsch-Kress type numerical inversion method for shape reconstruction of metallic sub-micron wires/rods on substrates. For increased speed of inversion, the numerical integration occurring in the forward scattering model, the far-field matching and the half-space Green's function is simplified: the surface current densities in the radiation integrals are approximated by spatially impulsive sources, matching of the sources with the measured scattered far field is done at discrete testing points, and finally, the half-space Green's function, accounting for the presence of the substrate, is approximated using Fresnel reflection and complex image theory. The wires/rods to be reconstructed are modeled using the Surface Impedance Boundary Condition (SIBC). We apply the inversion method to experimental angular-resolved bistatic scatterometric data (BRDF), measured at the Danish Fundamental Metrology using a 325 nm He-Cd laser. The cross-sections of three platinum (Pt) sub-micron wires on silicon (Si) substrate are estimated from the far-field BRDF data. In addition, we present an analysis of the accuracy and efficiency of the inversion for families of circular perfectly electrically conducting and silver (Ag) submicron wires on Si substrate, using numerically simulated measurement data.

M3 - Conference abstract for conference

ER -

Karamehmedovic M, Hansen P-E, Karamehmedovic E, Wriedt T. Fast cross section reconstruction for metallic sub-micron wires on a substrate. 2012. Abstract from E-MRS 2012 Spring Meeting, Strasbourg, France.