Fast Characterization of Moving Samples with Nano-Textured Surfaces

Morten Hannibal Madsen, Poul-Erik Hansen, Maksim Zalkovskij, Mirza Karamehmedović, Jørgen Garnæs

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Abstract

Characterization of structures using conventional optical microscopy is restricted by the diffraction limit. Techniques like atomic force and scanning electron microscopy can investigate smaller structures but are very time consuming. We show that using scatterometry, a technique based on optical diffraction, integrated into a commercial light microscope we can characterize nano-textured surfaces in a few milliseconds. The adapted microscope has two detectors, a CCD camera used to easily find an area of interest and a spectrometer for the measurements. We demonstrate that the microscope has a resolution in the nanometer range for the topographic parameters: height, width, and sidewall angle of a periodic grating, also in an environment with many vibrations, such as a production facility with heavy equipment.
Original languageEnglish
JournalOptica
Volume2
Issue number4
Pages (from-to)301-306
ISSN2334-2536
DOIs
Publication statusPublished - 2015

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