Fabrication of TiO2 and Al2O3 High Aspect Ratio Nanostructured Gratings at Sub-Micrometer Scale

Evgeniy Shkondin; Jonas Michael-Lindhard; Mikkel Dysseholm Mar; Flemming Jensen; Andrei Lavrinenko

Fabrication of TiO2 and Al2O3 High Aspect Ratio Nanostructured Gratings at Sub-Micrometer Scale

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Original language	English
Publication date	2015
Publication status	Published - 2015
Event	15th International Conference on Atomic Layer Deposition - Portland Hilton, Portland, United States Duration: 29 Jun 2015 → 1 Jul 2015 Conference number: 15

Conference

Conference	15th International Conference on Atomic Layer Deposition
Number	15
Location	Portland Hilton
Country/Territory	United States
City	Portland
Period	29/06/2015 → 01/07/2015

Bibliographical note

15th International Conference on Atomic Layer Deposition, 29 June – 01 July 2015, Portland, USA, Book of Abstracts, p.249

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AbstractFinal published version, 493 KB

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title = "Fabrication of TiO2 and Al2O3 High Aspect Ratio Nanostructured Gratings at Sub-Micrometer Scale",

author = "Evgeniy Shkondin and Jonas Michael-Lindhard and Mar, \{Mikkel Dysseholm\} and Flemming Jensen and Andrei Lavrinenko",

note = "15th International Conference on Atomic Layer Deposition, 29 June – 01 July 2015, Portland, USA, Book of Abstracts, p.249 ; 15th International Conference on Atomic Layer Deposition, ALD 2015 ; Conference date: 29-06-2015 Through 01-07-2015",

year = "2015",

language = "English",

}

TY - CONF

T1 - Fabrication of TiO2 and Al2O3 High Aspect Ratio Nanostructured Gratings at Sub-Micrometer Scale

AU - Shkondin, Evgeniy

AU - Michael-Lindhard, Jonas

AU - Mar, Mikkel Dysseholm

AU - Jensen, Flemming

AU - Lavrinenko, Andrei

N1 - Conference code: 15

PY - 2015

Y1 - 2015

M3 - Paper

T2 - 15th International Conference on Atomic Layer Deposition

Y2 - 29 June 2015 through 1 July 2015

ER -