Fabrication of TiO2 and Al2O3 High Aspect Ratio Nanostructured Gratings at Sub-Micrometer Scale

Evgeniy Shkondin, Jonas Michael-Lindhard, Mikkel Dysseholm Mar, Flemming Jensen, Andrei Lavrinenko

    Research output: Contribution to conference › Paper › Research › peer-review

    299 Downloads (Pure)
    Original languageEnglish
    Publication date2015
    Publication statusPublished - 2015
    Event15th International Conference on Atomic Layer Deposition - Portland Hilton, Portland, United States
    Duration: 29 Jun 2015 → 1 Jul 2015
    Conference number: 15

    Conference

    Conference15th International Conference on Atomic Layer Deposition
    Number15
    LocationPortland Hilton
    Country/TerritoryUnited States
    CityPortland
    Period29/06/2015 → 01/07/2015

    Bibliographical note

    15th International Conference on Atomic Layer Deposition, 29 June – 01 July 2015, Portland, USA, Book of Abstracts, p.249

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