Fabrication of TiO2 and Al2O3 High Aspect Ratio Nanostructured Gratings at Sub-Micrometer Scale

Research output: Contribution to conferencePaperResearchpeer-review

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Original languageEnglish
Publication date2015
Publication statusPublished - 2015
Event15th International Conference on Atomic Layer Deposition - Portland Hilton, Portland, Oregon, United States
Duration: 29 Jun 20151 Jul 2015

Conference

Conference15th International Conference on Atomic Layer Deposition
LocationPortland Hilton
CountryUnited States
CityPortland, Oregon
Period29/06/201501/07/2015

Bibliographical note

15th International Conference on Atomic Layer Deposition, 29 June – 01 July 2015, Portland, USA, Book of Abstracts, p.249

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