Fabrication of submicron suspended structures by laser and AFM
                lithography on aluminium combined with reactive ion etching

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	16
Issue number	6 Nov/Dec
Pages (from-to)	2977-2981
ISSN	1071-1023
Publication status	Published - 1998

OpenUrl availability

@article{d2ea3159d9eb4177a167bc9d54b42c84,

title = "Fabrication of submicron suspended structures by laser and AFM lithography on aluminium combined with reactive ion etching",

author = "Anja Boisen and Karen Birkelund and Ole Hansen and Francois Grey",

year = "1998",

language = "English",

volume = "16",

pages = "2977--2981",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6 Nov/Dec",

}

Research output: Contribution to journal › Journal article › Research › peer-review

TY - JOUR

T1 - Fabrication of submicron suspended structures by laser and AFM lithography on aluminium combined with reactive ion etching

AU - Boisen, Anja

AU - Birkelund, Karen

AU - Hansen, Ole

AU - Grey, Francois

PY - 1998

Y1 - 1998

M3 - Journal article

SN - 1071-1023

VL - 16

SP - 2977

EP - 2981

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6 Nov/Dec

ER -