Fabrication of submicron suspended structures by laser and AFM
                lithography on aluminum combined with reactive ion etching.

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Vacuum Science & Technology B
Volume	16
Issue number	6
Pages (from-to)	2977-81
ISSN	1071-1023
Publication status	Published - 1998

OpenUrl availability

@article{7f2ae4b107d54c26970a19a4c715294a,

title = "Fabrication of submicron suspended structures by laser and AFM lithography on aluminum combined with reactive ion etching.",

author = "Anja Boisen and Karen Birkelund and Ole Hansen and Francois Grey",

year = "1998",

language = "English",

volume = "16",

pages = "2977--81",

journal = "Journal of Vacuum Science & Technology B",

issn = "1071-1023",

publisher = "American Institute of Physics",

number = "6",

}

TY - JOUR

T1 - Fabrication of submicron suspended structures by laser and AFM lithography on aluminum combined with reactive ion etching.

AU - Boisen, Anja

AU - Birkelund, Karen

AU - Hansen, Ole

AU - Grey, Francois

PY - 1998

Y1 - 1998

M3 - Journal article

SN - 1071-1023

VL - 16

SP - 2977

EP - 2981

JO - Journal of Vacuum Science & Technology B

JF - Journal of Vacuum Science & Technology B

IS - 6

ER -