Fabrication of reverse symmetry polymer waveguide sensor chips on nanoporous substrates using dip-floating

R. Horvath, H.C. Pedersen, N. Skivesen, C. Svanberg, N.B. Larsen

    Research output: Contribution to journalJournal articlepeer-review

    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume15
    Pages (from-to)1260-1264
    ISSN0960-1317
    DOIs
    Publication statusPublished - 2005

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