Fabrication of polymer microcantilevers by nanoimprint lithography

Anders Greve

Research output: Book/Report › Ph.D. thesis

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Original language	English

Place of Publication	Kgs. Lyngby, Denmark
Publisher	Technical University of Denmark
Publication status	Published - 2010

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3D nanolithography for self-aligned nano- and microstructures
Greve, A. (PhD Student), Boisen, A. (Main Supervisor), Svendsen, W. E. (Supervisor), De Grave, A. (Examiner), Berger, R. (Examiner) & Hierold, C. (Examiner)
Forskningsrådsfinansiering
01/02/2007 → 22/09/2010
Project: PhD