Fabrication of photonic components by nanoimprint technology within ePIXnet

U. Plachetka, Anders Kristensen, S. Scheerlinck, J. Huskens, N. Koo, H. Kurz

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Microelectronic Engineering
Volume	85
Issue number	5-6
Pages (from-to)	886-889
ISSN	0167-9317
DOIs	https://doi.org/10.1016/j.mee.2008.01.013
Publication status	Published - 2008

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title = "Fabrication of photonic components by nanoimprint technology within ePIXnet",

author = "U. Plachetka and Anders Kristensen and S. Scheerlinck and J. Huskens and N. Koo and H. Kurz",

year = "2008",

doi = "10.1016/j.mee.2008.01.013",

language = "English",

volume = "85",

pages = "886--889",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

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TY - JOUR

T1 - Fabrication of photonic components by nanoimprint technology within ePIXnet

AU - Plachetka, U.

AU - Kristensen, Anders

AU - Scheerlinck, S.

AU - Huskens, J.

AU - Koo, N.

AU - Kurz, H.

PY - 2008

Y1 - 2008

U2 - 10.1016/j.mee.2008.01.013

DO - 10.1016/j.mee.2008.01.013

M3 - Journal article

SN - 0167-9317

VL - 85

SP - 886

EP - 889

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-6

ER -