Fabrication of pedestal high-contrast grating for biosensing applications

Leonid Yu. Beliaev; Peter Groth Stounbjerg; Giovanni Finco; Ada-Ioana Bunea; Radu Malureanu; Lars René Lindvold; Osamu Takayama; Peter E. Andersen; Andrei V. Lavrinenko

Fabrication of pedestal high-contrast grating for biosensing applications

Leonid Yu. Beliaev, Peter Groth Stounbjerg, Giovanni Finco, Ada-Ioana Bunea, Radu Malureanu, Lars René Lindvold, Osamu Takayama, Peter E. Andersen, Andrei V. Lavrinenko

Technical University of Denmark

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2022
Number of pages	2
Publication status	Published - 2022
Event	48^th International Conference on Micro and Nano Engineering - Gasthuisberg, Leuven, Belgium Duration: 19 Sept 2022 → 23 Sept 2022 Conference number: 48

Conference

Conference	48^th International Conference on Micro and Nano Engineering
Number	48
Location	Gasthuisberg
Country/Territory	Belgium
City	Leuven
Period	19/09/2022 → 23/09/2022

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title = "Fabrication of pedestal high-contrast grating for biosensing applications",

author = "Beliaev, {Leonid Yu.} and Stounbjerg, {Peter Groth} and Giovanni Finco and Ada-Ioana Bunea and Radu Malureanu and Lindvold, {Lars Ren{\'e}} and Osamu Takayama and Andersen, {Peter E.} and Lavrinenko, {Andrei V.}",

year = "2022",

language = "English",

note = "48<sup>th</sup> International Conference on Micro and Nano Engineering, MNE 2022 ; Conference date: 19-09-2022 Through 23-09-2022",

}

TY - ABST

T1 - Fabrication of pedestal high-contrast grating for biosensing applications

AU - Beliaev, Leonid Yu.

AU - Stounbjerg, Peter Groth

AU - Finco, Giovanni

AU - Bunea, Ada-Ioana

AU - Malureanu, Radu

AU - Lindvold, Lars René

AU - Takayama, Osamu

AU - Andersen, Peter E.

AU - Lavrinenko, Andrei V.

N1 - Conference code: 48

PY - 2022

Y1 - 2022

M3 - Conference abstract for conference

T2 - 48<sup>th</sup> International Conference on Micro and Nano Engineering

Y2 - 19 September 2022 through 23 September 2022

ER -