| Original language | English |
|---|---|
| Title of host publication | Proceedings of the Mesomechanics 1 |
| Publication date | 2002 |
| Pages | 161-165 |
| Publication status | Published - 2002 |
Fabrication of Nickel Microshutter Arrays for Spatial Light Modulation
J.T. Ravnkilde, Kristian Pontoppidan Larsen, H. Henningsen
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review