| Original language | English |
|---|---|
| Publication date | 2011 |
| Publication status | Published - 2011 |
| Event | The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Las Vegas, United States Duration: 31 May 2011 → 3 Jun 2011 Conference number: 55 |
Conference
| Conference | The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
|---|---|
| Number | 55 |
| Country/Territory | United States |
| City | Las Vegas |
| Period | 31/05/2011 → 03/06/2011 |