Fabrication of Microcomponents by Electrochemical Manufacturing: Advanced Feed-Through Metallisation on Silicon and Nickel Micromechanical Resonators

Keyphrases

• Micromechanical Resonator 100%
• Feedthrough 100%
• Metallization 100%
• Electrochemical Manufacturing 100%
• Micro Parts 100%
• Electroplating 66%
• Controlled Corrosion 33%
• Selective Etching 33%
• Multiple Feeds 33%
• Electroplating Process 33%
• System Structure 33%
• Stress-free 33%
• Electroless Plating 33%
• Usage Example 33%
• Adhesive Bonding 33%
• UV Lithography 33%
• Conductive Adhesive 33%
• Flip-chip Bonding 33%
• System Product 33%
• Microelectronics 33%
• Optical Quality 33%
• CMOS Devices 33%
• Manufacturing Sequence 33%
• Optical Readout 33%

Material Science

• Electroplating 100%
• Silicon 100%
• Microelectromechanical System 100%
• Resonator 100%
• Silicon Wafer 33%
• Electronic Circuit 33%
• Lithography 33%
• Electroless Deposition 33%
• Adhesive Bonding 33%
• Ceramic Material 33%
• Corrosion 33%
• Tin 33%

Engineering

• System Structure 33%