Fabrication of integrated metallic MEMS devices

Arda Deniz Yalcinkaya; Jan Tue Ravnkilde; Ole Hansen

Fabrication of integrated metallic MEMS devices

Arda Deniz Yalcinkaya, Jan Tue Ravnkilde, Ole Hansen

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characterised with respect to the quality factor.

Original language	English
Journal	Electronics Letters
Volume	38
Issue number	24
Pages (from-to)	1526-1527
ISSN	0013-5194
Publication status	Published - 2002

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title = "Fabrication of integrated metallic MEMS devices",

abstract = "A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characterised with respect to the quality factor.",

author = "Yalcinkaya, {Arda Deniz} and Ravnkilde, {Jan Tue} and Ole Hansen",

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T1 - Fabrication of integrated metallic MEMS devices

AU - Yalcinkaya, Arda Deniz

AU - Ravnkilde, Jan Tue

AU - Hansen, Ole

PY - 2002

Y1 - 2002

N2 - A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characterised with respect to the quality factor.

AB - A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characterised with respect to the quality factor.

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EP - 1527

JO - Electronics Letters

JF - Electronics Letters

SN - 0013-5194

IS - 24

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Fabrication of integrated metallic MEMS devices

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