Abstract
| Original language | English |
|---|---|
| Journal | Electronics letters |
| Volume | 38 |
| Issue number | 24 |
| Pages (from-to) | 1526-1527 |
| ISSN | 0013-5194 |
| Publication status | Published - 2002 |
Cite this
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Fabrication of integrated metallic MEMS devices. / Yalcinkaya, Arda Deniz; Ravnkilde, Jan Tue; Hansen, Ole.
In: Electronics letters, Vol. 38, No. 24, 2002, p. 1526-1527.Research output: Contribution to journal › Journal article › Research › peer-review
TY - JOUR
T1 - Fabrication of integrated metallic MEMS devices
AU - Yalcinkaya, Arda Deniz
AU - Ravnkilde, Jan Tue
AU - Hansen, Ole
PY - 2002
Y1 - 2002
N2 - A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characterised with respect to the quality factor.
AB - A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characterised with respect to the quality factor.
M3 - Journal article
VL - 38
SP - 1526
EP - 1527
JO - Electronics Letters
JF - Electronics Letters
SN - 0013-5194
IS - 24
ER -