Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedings – Annual report year: 2019Researchpeer-review

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We improve the Q of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high Q (~73,000) for such a device with anomalous dispersion.

Original languageEnglish
Title of host publicationCLEO: Science and Innovations 2019
PublisherOptical Society of America
Publication date2019
Article numberPaper SM2O.7
ISBN (Print)978-1-943580-57-6
Publication statusPublished - 2019
EventCLEO: Science and Innovations 2019
- San Jose Convention Center, San Jose, United States
Duration: 5 May 201910 May 2019


ConferenceCLEO: Science and Innovations 2019
LocationSan Jose Convention Center
CountryUnited States
CitySan Jose
CitationsWeb of Science® Times Cited: No match on DOI

ID: 183632122