Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction

Yi Zheng, Minhao Pu, Ailun Yi, Ayman Nassar Kamel, Martin Romme Henriksen, Asbjørn A. Jørgensen, Xin Ou, Haiyan Ou

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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Engineering

Physics

Material Science