Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction

Yi Zheng, Minhao Pu, Ailun Yi, Ayman Nassar Kamel, Martin Romme Henriksen, Asbjørn A. Jørgensen, Xin Ou, Haiyan Ou

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

We improve the Q of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high Q (~73,000) for such a device with anomalous dispersion.

Original languageEnglish
Title of host publicationCLEO: Science and Innovations 2019
PublisherOptical Society of America
Publication date2019
Article numberPaper SM2O.7
ISBN (Print)978-1-943580-57-6
DOIs
Publication statusPublished - 2019
EventCLEO: Science and Innovations 2019
- San Jose Convention Center, San Jose, United States
Duration: 5 May 201910 May 2019

Conference

ConferenceCLEO: Science and Innovations 2019
LocationSan Jose Convention Center
CountryUnited States
CitySan Jose
Period05/05/201910/05/2019

Cite this

Zheng, Y., Pu, M., Yi, A., Kamel, A. N., Henriksen, M. R., Jørgensen, A. A., ... Ou, H. (2019). Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction. In CLEO: Science and Innovations 2019 [Paper SM2O.7] Optical Society of America. https://doi.org/10.1364/CLEO_SI.2019.SM2O.7
Zheng, Yi ; Pu, Minhao ; Yi, Ailun ; Kamel, Ayman Nassar ; Henriksen, Martin Romme ; Jørgensen, Asbjørn A. ; Ou, Xin ; Ou, Haiyan. / Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction. CLEO: Science and Innovations 2019. Optical Society of America, 2019.
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title = "Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction",
abstract = "We improve the Q of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high Q (~73,000) for such a device with anomalous dispersion.",
author = "Yi Zheng and Minhao Pu and Ailun Yi and Kamel, {Ayman Nassar} and Henriksen, {Martin Romme} and J{\o}rgensen, {Asbj{\o}rn A.} and Xin Ou and Haiyan Ou",
year = "2019",
doi = "10.1364/CLEO_SI.2019.SM2O.7",
language = "English",
isbn = "978-1-943580-57-6",
booktitle = "CLEO: Science and Innovations 2019",
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Zheng, Y, Pu, M, Yi, A, Kamel, AN, Henriksen, MR, Jørgensen, AA, Ou, X & Ou, H 2019, Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction. in CLEO: Science and Innovations 2019., Paper SM2O.7, Optical Society of America, CLEO: Science and Innovations 2019
, San Jose, United States, 05/05/2019. https://doi.org/10.1364/CLEO_SI.2019.SM2O.7

Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction. / Zheng, Yi; Pu, Minhao; Yi, Ailun; Kamel, Ayman Nassar; Henriksen, Martin Romme; Jørgensen, Asbjørn A.; Ou, Xin; Ou, Haiyan.

CLEO: Science and Innovations 2019. Optical Society of America, 2019. Paper SM2O.7.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

TY - GEN

T1 - Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction

AU - Zheng, Yi

AU - Pu, Minhao

AU - Yi, Ailun

AU - Kamel, Ayman Nassar

AU - Henriksen, Martin Romme

AU - Jørgensen, Asbjørn A.

AU - Ou, Xin

AU - Ou, Haiyan

PY - 2019

Y1 - 2019

N2 - We improve the Q of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high Q (~73,000) for such a device with anomalous dispersion.

AB - We improve the Q of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high Q (~73,000) for such a device with anomalous dispersion.

U2 - 10.1364/CLEO_SI.2019.SM2O.7

DO - 10.1364/CLEO_SI.2019.SM2O.7

M3 - Article in proceedings

SN - 978-1-943580-57-6

BT - CLEO: Science and Innovations 2019

PB - Optical Society of America

ER -

Zheng Y, Pu M, Yi A, Kamel AN, Henriksen MR, Jørgensen AA et al. Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction. In CLEO: Science and Innovations 2019. Optical Society of America. 2019. Paper SM2O.7 https://doi.org/10.1364/CLEO_SI.2019.SM2O.7