Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction

Yi Zheng; Minhao Pu; Ailun Yi; Ayman Nassar Kamel; Martin Romme Henriksen; Asbjørn A. Jørgensen; Xin Ou; Haiyan Ou

doi:10.1364/CLEO_SI.2019.SM2O.7

Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction

Yi Zheng, Minhao Pu, Ailun Yi, Ayman Nassar Kamel, Martin Romme Henriksen, Asbjørn A. Jørgensen, Xin Ou, Haiyan Ou

Centre of Excellence for Silicon Photonics for Optical Communications

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

We improve the Q of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high Q (~73,000) for such a device with anomalous dispersion.

Original language	English
Title of host publication	CLEO: Science and Innovations 2019
Publisher	IEEE
Publication date	2019
Article number	Paper SM2O.7
ISBN (Print)	978-1-943580-57-6
DOIs	https://doi.org/10.1364/CLEO_SI.2019.SM2O.7
Publication status	Published - 2019
Event	2019 CLEO Conference & Exhibition - San Jose Convention Center, San Jose, United States Duration: 5 May 2019 → 10 May 2019 Conference number: 39 https://www.cleoconference.org/home/ http://www.cleoconference.org

Conference

Conference	2019 CLEO Conference & Exhibition
Number	39
Location	San Jose Convention Center
Country/Territory	United States
City	San Jose
Period	05/05/2019 → 10/05/2019
Sponsor	AdValue Photonics Inc, American Elements, Class5 Photonics, Coherent Inc., Go!Foton, American Physical Society, IEEE, The Optical Society
Internet address	https://www.cleoconference.org/home/ http://www.cleoconference.org

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@inproceedings{60a8016ccaa049a0bdc3ad57b2cd5c9b,

title = "Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction",

abstract = "We improve the Q of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high Q (~73,000) for such a device with anomalous dispersion.",

author = "Yi Zheng and Minhao Pu and Ailun Yi and Kamel, {Ayman Nassar} and Henriksen, {Martin Romme} and J{\o}rgensen, {Asbj{\o}rn A.} and Xin Ou and Haiyan Ou",

year = "2019",

doi = "10.1364/CLEO_SI.2019.SM2O.7",

language = "English",

isbn = "978-1-943580-57-6",

booktitle = "CLEO: Science and Innovations 2019",

publisher = "IEEE",

address = "United States",

note = "2019 CLEO Conference & Exhibition, CLEO 2019 ; Conference date: 05-05-2019 Through 10-05-2019",

url = "https://www.cleoconference.org/home/, http://www.cleoconference.org",

}

Zheng, Y , Pu, M, Yi, A, Kamel, AN, Henriksen, MR, Jørgensen, AA, Ou, X & Ou, H 2019, Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction. in CLEO: Science and Innovations 2019., Paper SM2O.7, IEEE, 2019 CLEO Conference & Exhibition, San Jose, California, United States, 05/05/2019. https://doi.org/10.1364/CLEO_SI.2019.SM2O.7

TY - GEN

T1 - Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction

AU - Zheng, Yi

AU - Pu, Minhao

AU - Yi, Ailun

AU - Kamel, Ayman Nassar

AU - Henriksen, Martin Romme

AU - Jørgensen, Asbjørn A.

AU - Ou, Xin

AU - Ou, Haiyan

N1 - Conference code: 39

PY - 2019

Y1 - 2019

N2 - We improve the Q of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high Q (~73,000) for such a device with anomalous dispersion.

AB - We improve the Q of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high Q (~73,000) for such a device with anomalous dispersion.

U2 - 10.1364/CLEO_SI.2019.SM2O.7

DO - 10.1364/CLEO_SI.2019.SM2O.7

M3 - Article in proceedings

SN - 978-1-943580-57-6

BT - CLEO: Science and Innovations 2019

PB - IEEE

T2 - 2019 CLEO Conference & Exhibition

Y2 - 5 May 2019 through 10 May 2019

ER -

Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction

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