A novel technique based on silicon micromachining for fabrication of linear arrays of high-frequency piezoelectric micromachined ultrasound transducers (pMUT) is presented. Piezoelectric elements are formed by deposition of lead zirconia titanate into etched features of a silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated element is characterized by pulse echo response.
|Journal||I E E E Transactions on Ultrasonics, Ferroelectrics and Frequency Control|
|Publication status||Published - 2010|
- Ultrasonic transducer arrays
- High-frequency effects
- Ultrasonic imaging
- Piezoelectric transducers