Fabrication of High-Frequency pMUT Arrays on Silicon Substrates

Thomas Pedersen, Tomasz Zawada, Karsten Hansen, Rasmus Lou-Møller, Erik Vilain Thomsen

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Abstract

A novel technique based on silicon micromachining for fabrication of linear arrays of high-frequency piezoelectric micromachined ultrasound transducers (pMUT) is presented. Piezoelectric elements are formed by deposition of lead zirconia titanate into etched features of a silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated element is characterized by pulse echo response.
Original languageEnglish
JournalI E E E Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Volume57
Issue number6
Pages (from-to)1470-1477
ISSN0885-3010
DOIs
Publication statusPublished - 2010

Keywords

  • Ultrasonic transducer arrays
  • Micromachining
  • High-frequency effects
  • Ultrasonic imaging
  • Piezoelectric transducers

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