Abstract
Pyrolytic carbon is a promising material for fabrication of micro- and nanomechanical sensors due to thepossibility to control both structural parameters and properties such as resonance frequency, residualstress and electrical conductivity. Here, we present a novel fabrication process for pyrolytic carbon stringresonators suspended over a through-wafer-orifice. The pyrolytic carbon string resonators had a length of400 μm, a width of 30 μm and a thickness of 700 nm. The string resonators were applied for characterization of nano- and microparticulate drug formulations using two different modes of operation. First, mass-sensing on nanograms of nebulized or spray coated paracetamol micro- and nanoparticles was demon-strated. Then, absorption spectra of the drug were obtained by nanomechanical infrared spectroscopy(NAM-IR). Finally, an efficient method for in situ regeneration of the sensor was demonstrated.
Original language | English |
---|---|
Journal | Sensors and Actuators A: Physical |
Volume | 288 |
Pages (from-to) | 194-203 |
ISSN | 0924-4247 |
DOIs | |
Publication status | Published - 2019 |
Keywords
- Pyrolytic carbon
- Mass sensing
- IR spectroscopy
- Paracetamol
- MEMS resonators