Fabrication of fluidic devices with 30 nm nanochannels by direct imprinting

Irene Fernandez Cuesta, Anna Laura Palmarelli, Xiaogan Liang, Jingyu Zhang, Scott Dhuey, Deirdre Olynick, Stefano Cabrini

    Research output: Contribution to journalJournal articleResearchpeer-review


    In this work, we propose an innovative approach to the fabrication of a complete micro/nano fluidic system, based on direct nanoimprint lithography. The fabricated device consists of nanochannels connected to U-shaped microchannels by triangular tapered inlets, and has four large reservoirs for liquid input. A master silicon stamp with the multilevel structures is fabricated first, and then a negative replica is made, to be used as a stamp for ultraviolet nanoimprint lithography (UV-NIL). Afterwards, just one single UV-NIL step is necessary for patterning all the the micro and nanostructures. Furthermore, the devices are made of all-transparent materials, and the method allows flexibility for the type of substrates used. The active material (an inorganic-organic hybrid polymer) used for the fabrication of the device has been carefully chosen, so it has adequate surface properties (inert and hydrophilic) for its direct use for biological applications. Devices having 30 nm wide, 30 nm deep nanochannels have been fabricated, and the successful performance of the fluidic system and the continuity of the nanochannels have been proven by flow tests. © 2011 American Vacuum Society.
    Original languageEnglish
    JournalJournal of Vacuum Science & Technology B
    Issue number6
    Pages (from-to)06F801-1/7
    Publication statusPublished - 2011

    Bibliographical note

    Paper presented at The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication/Microfluidics


    • Biological applications
    • Inorganic-organic hybrid polymers
    • Active material
    • Fabricated device
    • Multi-level structures
    • Flow tests
    • U-shaped
    • Biological materials
    • Silicon stamp
    • Surface properties
    • Fluidic systems
    • Innovative approaches
    • Direct use
    • Ultraviolet-nanoimprint lithography
    • Nanoimprint lithography
    • Nano channels
    • Fabrication
    • Micro and nanostructures

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