Fabrication of electroplated nickel micromechanical resonators.

Jan Tue Ravnkilde, A.D. Yalcinkaya, Leif Steen Johansen, Ole Hansen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

    Original languageEnglish
    Title of host publicationFabrication of electroplated nickel micromechanical resonators.
    PublisherAcademic Press
    Publication date1999
    Publication statusPublished - 1999
    Event196th Meeting of the Electrochemical Society - Honolulu, Hawaii, United States
    Duration: 17 Oct 199922 Oct 1999
    http://www.electrochem.org/meetings/

    Conference

    Conference196th Meeting of the Electrochemical Society
    CountryUnited States
    CityHonolulu, Hawaii
    Period17/10/199922/10/1999
    Internet address

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