Fabrication of completely free-standing pyrolytic carbon string resonators

Quang Long Nguyen, Peter Emil Larsen, Anja Boisen, Stephan Sylvest Keller

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    128 Downloads (Pure)
    Original languageEnglish
    Publication date2017
    Publication statusPublished - 2017
    Event43rd International conference on Micro and Nano Engineering - Braga, Portugal
    Duration: 18 Sept 201722 Sept 2017
    Conference number: 43

    Conference

    Conference43rd International conference on Micro and Nano Engineering
    Number43
    Country/TerritoryPortugal
    CityBraga
    Period18/09/201722/09/2017

    Keywords

    • Pyrolytic carbon
    • MEMS resonator
    • Mass sensor

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