Fabrication of completely free-standing pyrolytic carbon string resonators

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Original languageEnglish
Publication date2017
Publication statusPublished - 2017
Event43rd International conference on Micro and Nano Engineering - Braga, Portugal
Duration: 18 Sep 201722 Sep 2017
Conference number: 43

Conference

Conference43rd International conference on Micro and Nano Engineering
Number43
CountryPortugal
CityBraga
Period18/09/201722/09/2017

Keywords

  • Pyrolytic carbon
  • MEMS resonator
  • Mass sensor

Cite this

Nguyen, Q. L., Larsen, P. E., Boisen, A., & Keller, S. S. (2017). Fabrication of completely free-standing pyrolytic carbon string resonators. Abstract from 43rd International conference on Micro and Nano Engineering, Braga, Portugal.