Fabrication of completely free-standing pyrolytic carbon string resonators

Quang Long Nguyen, Peter Emil Larsen, Anja Boisen, Stephan Sylvest Keller

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2017
Publication statusPublished - 2017
Event43rd International conference on Micro and Nano Engineering - Braga, Portugal
Duration: 18 Sep 201722 Sep 2017
Conference number: 43

Conference

Conference43rd International conference on Micro and Nano Engineering
Number43
Country/TerritoryPortugal
CityBraga
Period18/09/201722/09/2017

Keywords

  • Pyrolytic carbon
  • MEMS resonator
  • Mass sensor

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