Fabrication of combined-scale nano- and microfluidic polymer systems using a multilevel dry etching, electroplating and molding process

Simone Tanzi, Peter Friis Østergaard, Marco Matteucci, Thomas Lehrmann Christiansen, Jiri Cech, Rodolphe Marie, Rafael J. Taboryski

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    Microfabricated single-cell capture and DNA stretching devices have been produced by
    injection molding. The fabrication scheme employed deep reactive ion etching in a silicon
    substrate, electroplating in nickel and molding in cyclic olefin polymer. This work proposes
    technical solutions to fabrication challenges associated with chip sealing and demolding of
    polymer high-volume replication methods. UV-assisted thermal bonding was found to ensure a
    strong seal of the microstructures in the molded part without altering the geometry of the
    channels. In the DNA stretching device, a low aspect ratio nanoslit (1/200) connecting two
    larger micro-channels was used to stretch a 168.5 kbp DNA molecule, while in the other
    device single-HeLa cells were captured against a micro-aperture connecting two larger
    microfluidic channels. Different dry etching processes have been investigated for the master
    origination of the cell-capture device. The combination of a modified Bosch process and an
    isotropic polysilicon etch was found to ensure the ease of demolding by resulting in slightly
    positively tapered sidewalls with negligible undercut at the mask interface.
    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume22
    Number of pages11
    ISSN0960-1317
    Publication statusPublished - 2012

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