Fabrication of Cantilevers by NIL

Anders Greve; Stephan Urs Keller; David Larsson; Anders Kristensen; Kresten Yvind; Jørn Märcher Hvam; Anja Boisen

Fabrication of Cantilevers by NIL

Anders Greve, Stephan Urs Keller, David Larsson, Anders Kristensen, Kresten Yvind, Jørn Märcher Hvam, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	In proceeding of "International Workshop on Nanomechanical Cantilever Sensors"
Publisher	Max Planck Institute for Polymer Research
Publication date	2008
Publication status	Published - 2008
Event	International Workshop on Nanomechanical Cantilever Sensors - Mainze, Germany Duration: 19 May 2008 → 21 May 2008

Workshop

Workshop	International Workshop on Nanomechanical Cantilever Sensors
Country/Territory	Germany
City	Mainze
Period	19/05/2008 → 21/05/2008

OpenUrl availability

Full text

Cite this

@inproceedings{3616b1adec4c4c9ea4d13109d4ba8642,

title = "Fabrication of Cantilevers by NIL",

author = "Anders Greve and Keller, {Stephan Urs} and David Larsson and Anders Kristensen and Kresten Yvind and Hvam, {J{\o}rn M{\"a}rcher} and Anja Boisen",

year = "2008",

language = "English",

booktitle = "In proceeding of {"}International Workshop on Nanomechanical Cantilever Sensors{"}",

publisher = "Max Planck Institute for Polymer Research",

note = "International Workshop on Nanomechanical Cantilever Sensors ; Conference date: 19-05-2008 Through 21-05-2008",

}

TY - GEN

T1 - Fabrication of Cantilevers by NIL

AU - Greve, Anders

AU - Keller, Stephan Urs

AU - Larsson, David

AU - Kristensen, Anders

AU - Yvind, Kresten

AU - Hvam, Jørn Märcher

AU - Boisen, Anja

PY - 2008

Y1 - 2008

M3 - Article in proceedings

BT - In proceeding of "International Workshop on Nanomechanical Cantilever Sensors"

PB - Max Planck Institute for Polymer Research

T2 - International Workshop on Nanomechanical Cantilever Sensors

Y2 - 19 May 2008 through 21 May 2008

ER -