Fabrication of Cantilevers by NIL

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationIn proceeding of "International Workshop on Nanomechanical Cantilever Sensors"
PublisherMax Planck Institute for Polymer Research
Publication date2008
Publication statusPublished - 2008
EventInternational Workshop on Nanomechanical Cantilever Sensors - Mainze, Germany
Duration: 19 May 200821 May 2008

Workshop

WorkshopInternational Workshop on Nanomechanical Cantilever Sensors
CountryGermany
CityMainze
Period19/05/200821/05/2008

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