Original language | English |
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Journal | Nanotechnology |
Volume | 15 |
Pages (from-to) | 628-633 |
ISSN | 0957-4484 |
Publication status | Published - 2004 |
Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist
Esko Sebastian Forsén, S.G. Nilsson, P. Carlberg, G. Abadal, F. Perez-Murano, J. Esteve, J. Montserrat, E. Figueras, F. Campabadal, J. Verd, L. Montelius, N. Barniol, Anja Boisen
Research output: Contribution to journal › Journal article › Research › peer-review