Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

Esko Sebastian Forsén; S.G. Nilsson; P. Carlberg; G. Abadal; F. Perez-Murano; J. Esteve; J. Montserrat; E. Figueras; F. Campabadal; J. Verd; L. Montelius; N. Barniol; Anja Boisen

Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

Esko Sebastian Forsén, S.G. Nilsson, P. Carlberg, G. Abadal, F. Perez-Murano, J. Esteve, J. Montserrat, E. Figueras, F. Campabadal, J. Verd, L. Montelius, N. Barniol, Anja Boisen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Nanotechnology
Volume	15
Pages (from-to)	628-633
ISSN	0957-4484
Publication status	Published - 2004

OpenUrl availability

Full text

Cite this

@article{65e94f5ebf5444759dd5a5435bf764f3,

title = "Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist",

author = "Fors{\'e}n, {Esko Sebastian} and S.G. Nilsson and P. Carlberg and G. Abadal and F. Perez-Murano and J. Esteve and J. Montserrat and E. Figueras and F. Campabadal and J. Verd and L. Montelius and N. Barniol and Anja Boisen",

year = "2004",

language = "English",

volume = "15",

pages = "628--633",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

AU - Forsén, Esko Sebastian

AU - Nilsson, S.G.

AU - Carlberg, P.

AU - Abadal, G.

AU - Perez-Murano, F.

AU - Esteve, J.

AU - Montserrat, J.

AU - Figueras, E.

AU - Campabadal, F.

AU - Verd, J.

AU - Montelius, L.

AU - Barniol, N.

AU - Boisen, Anja

PY - 2004

Y1 - 2004

M3 - Journal article

SN - 0957-4484

VL - 15

SP - 628

EP - 633

JO - Nanotechnology

JF - Nanotechnology

ER -