Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

Esko Sebastian Forsén; S.G. Nilsson; P. Carlberg; G. Abadal; F. Perez-Murano; J. Esteve; J. Montserrat; E. Figueras; F. Campabadal; J. Verd; L. Montelius; N. Barniol; Anja Boisen

Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

Esko Sebastian Forsén, S.G. Nilsson, P. Carlberg, G. Abadal, F. Perez-Murano, J. Esteve, J. Montserrat, E. Figueras, F. Campabadal, J. Verd, L. Montelius, N. Barniol, Anja Boisen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Nanotechnology
Volume	15
Pages (from-to)	628-633
ISSN	0957-4484
Publication status	Published - 2004

Cite this

Forsén, Esko Sebastian ; Nilsson, S.G. ; Carlberg, P. ; Abadal, G. ; Perez-Murano, F. ; Esteve, J. ; Montserrat, J. ; Figueras, E. ; Campabadal, F. ; Verd, J. ; Montelius, L. ; Barniol, N. ; Boisen, Anja. / Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist. In: Nanotechnology. 2004 ; Vol. 15. pp. 628-633.

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year = "2004",

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pages = "628--633",

journal = "Nanotechnology",

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Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist. / Forsén, Esko Sebastian; Nilsson, S.G.; Carlberg, P.; Abadal, G.; Perez-Murano, F.; Esteve, J.; Montserrat, J.; Figueras, E.; Campabadal, F.; Verd, J.; Montelius, L.; Barniol, N.; Boisen, Anja.

In: Nanotechnology, Vol. 15, 2004, p. 628-633.

Research output: Contribution to journal › Journal article › Research › peer-review

TY - JOUR

T1 - Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

AU - Forsén, Esko Sebastian

AU - Nilsson, S.G.

AU - Carlberg, P.

AU - Abadal, G.

AU - Perez-Murano, F.

AU - Esteve, J.

AU - Montserrat, J.

AU - Figueras, E.

AU - Campabadal, F.

AU - Verd, J.

AU - Montelius, L.

AU - Barniol, N.

AU - Boisen, Anja

PY - 2004

Y1 - 2004

M3 - Journal article

VL - 15

SP - 628

EP - 633

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

ER -