Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

Esko Sebastian Forsén, S.G. Nilsson, P. Carlberg, G. Abadal, F. Perez-Murano, J. Esteve, J. Montserrat, E. Figueras, F. Campabadal, J. Verd, L. Montelius, N. Barniol, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    Pages (from-to)628-633
    Publication statusPublished - 2004

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