Fabrication of bulk acoustic silicon disk resonator for liquid operation

Jan Harry Hales, Zachary James Davis, Meng Tang, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationAbstracts of MNE - 33rd International Conference on Micro and Nano Engineering
    Publication date2007
    Pages367-368
    Publication statusPublished - 2007
    Event33rd International Conference on Micro- and Nano-Engineering - Copenhagen, Denmark
    Duration: 23 Sep 200726 Sep 2007
    Conference number: 33
    http://www.mne07.org/

    Conference

    Conference33rd International Conference on Micro- and Nano-Engineering
    Number33
    CountryDenmark
    CityCopenhagen
    Period23/09/200726/09/2007
    Internet address

    Cite this

    Hales, J. H., Davis, Z. J., Tang, M., & Boisen, A. (2007). Fabrication of bulk acoustic silicon disk resonator for liquid operation. In Abstracts of MNE - 33rd International Conference on Micro and Nano Engineering (pp. 367-368)