Fabrication of bulk acoustic silicon disk resonator for liquid operation

Jan Harry Hales, Zachary James Davis, Meng Tang, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

Original language	English
Title of host publication	Abstracts of MNE - 33rd International Conference on Micro and Nano Engineering
Publication date	2007
Pages	367-368
Publication status	Published - 2007
Event	33rd International Conference on Micro- and Nano-Engineering - Copenhagen, Denmark Duration: 23 Sept 2007 → 26 Sept 2007 Conference number: 33 http://www.mne07.org/

Conference	33rd International Conference on Micro- and Nano-Engineering
Number	33
Country/Territory	Denmark
City	Copenhagen
Period	23/09/2007 → 26/09/2007
Internet address	http://www.mne07.org/

OpenUrl availability

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title = "Fabrication of bulk acoustic silicon disk resonator for liquid operation",

author = "Hales, {Jan Harry} and Davis, {Zachary James} and Meng Tang and Anja Boisen",

year = "2007",

language = "English",

pages = "367--368",

booktitle = "Abstracts of MNE - 33rd International Conference on Micro and Nano Engineering",

note = "33rd International Conference on Micro- and Nano-Engineering, MNE07 ; Conference date: 23-09-2007 Through 26-09-2007",

url = "http://www.mne07.org/",

}

TY - ABST

T1 - Fabrication of bulk acoustic silicon disk resonator for liquid operation

AU - Hales, Jan Harry

AU - Davis, Zachary James

AU - Tang, Meng

AU - Boisen, Anja

N1 - Conference code: 33

PY - 2007

Y1 - 2007

M3 - Conference abstract in proceedings

SP - 367

EP - 368

BT - Abstracts of MNE - 33rd International Conference on Micro and Nano Engineering

T2 - 33rd International Conference on Micro- and Nano-Engineering

Y2 - 23 September 2007 through 26 September 2007

ER -