Fabrication of biopolymer cantilevers using nanoimprint lithography

Stephan Sylvest Keller, Nikolaj Agentoft Feidenhans'l, Nis Fisker-Bødker, Damien Soulat, Anders Greve, David Plackett, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review


    The biodegradable polymer poly(l-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10 μm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major challenge was the high adhesion between PLLA and silicon stamp. Optimized stamp fabrication and the deposition of a 125 nm thick fluorocarbon anti-stiction coating on the PLLA allowed the fabrication of biopolymer cantilevers. Resonance frequency measurements were used to estimate the Young’s modulus of the device material.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Issue number8
    Pages (from-to)2294-2296
    Publication statusPublished - 2011


    • Biopolymers


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