Fabrication of biopolymer cantilevers using nanoimprint lithography

Stephan Sylvest Keller, Nikolaj Agentoft Feidenhans'l, Nis Fisker-Bødker, Damien Soulat, Anders Greve, David Plackett, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    The biodegradable polymer poly(l-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10 μm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major challenge was the high adhesion between PLLA and silicon stamp. Optimized stamp fabrication and the deposition of a 125 nm thick fluorocarbon anti-stiction coating on the PLLA allowed the fabrication of biopolymer cantilevers. Resonance frequency measurements were used to estimate the Young’s modulus of the device material.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume88
    Issue number8
    Pages (from-to)2294-2296
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2011

    Keywords

    • Biopolymers

    Cite this

    Keller, S. S., Feidenhans'l, N. A., Fisker-Bødker, N., Soulat, D., Greve, A., Plackett, D., & Boisen, A. (2011). Fabrication of biopolymer cantilevers using nanoimprint lithography. Microelectronic Engineering, 88(8), 2294-2296. https://doi.org/10.1016/j.mee.2011.02.095