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Fabrication of beam homogenizers in quartz by laser micromachining
G Kopitkovas
, T Lippert
, Christin David
,
Stela Canulescu
, A Wokaun
, J Gobrecht
Paul Scherrer Institute
Research output
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Contribution to journal
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Journal article
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Research
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peer-review
Overview
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Dive into the research topics of 'Fabrication of beam homogenizers in quartz by laser micromachining'. Together they form a unique fingerprint.
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Engineering
Homogenizer
100%
Laser Micromachining
100%
Silicon Dioxide
100%
Laser Fluence
60%
One Step
20%
Micro Machining
20%
Etching Process
20%
Continuous Profile
20%
Etch Rate
20%
Phase Mask
20%
Excimer Laser
20%
Yield Point
20%
Material Science
Wet Etching
100%
Laser Beam Machining
100%
Micromachining
100%
Physics
Fluence
100%
Laser Machining
100%
Micromachining
33%
Yield Point
33%
Excimer Laser
33%
Earth and Planetary Sciences
Fluence
100%
Micromachining
100%
Excimer
33%
Yield Point
33%
Acetone
33%
Keyphrases
Wet Etching Process
20%