Fabrication of antireflective SiC surface using plasma etching with self‐assembled nanopattern

Yiyu Ou, Aikaterini Argyraki, Haiyan Ou

Research output: Contribution to conferencePosterResearchpeer-review

82 Downloads (Pure)
Original languageEnglish
Publication date2013
Publication statusPublished - 2013
Event39th International Conference on Micro and Nano Engineering - London, United Kingdom
Duration: 16 Sep 201319 Sep 2013
Conference number: 39th

Conference

Conference39th International Conference on Micro and Nano Engineering
Number39th
CountryUnited Kingdom
CityLondon
Period16/09/201319/09/2013

Bibliographical note

39th International Conference on Micro and Nano Engineering
16 – 19 September 2013

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