Fabrication of antireflective SiC surface using plasma etching with self‐assembled nanopattern

Yiyu Ou, Aikaterini Argyraki, Haiyan Ou

    Research output: Contribution to conference › Poster › Research › peer-review

    90 Downloads (Pure)
    Original languageEnglish
    Publication date2013
    Publication statusPublished - 2013
    Event39th International Conference on Micro and Nano Engineering - London, United Kingdom
    Duration: 16 Sept 2013 → 19 Sept 2013
    Conference number: 39th

    Conference

    Conference39th International Conference on Micro and Nano Engineering
    Number39th
    Country/TerritoryUnited Kingdom
    CityLondon
    Period16/09/2013 → 19/09/2013

    Bibliographical note

    39th International Conference on Micro and Nano Engineering
    16 – 19 September 2013

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