Fabrication of an all-metal atomic force microscope probe

Jan Pihl Rasmussen; Peter Torben Tang; Ole Hansen; Per Møller; Curt Sander

doi:10.1109/SENSOR.1997.613686

Fabrication of an all-metal atomic force microscope probe

Jan Pihl Rasmussen
, Peter Torben Tang
, Ole Hansen
, Per Møller
, Curt Sander

DME - Danish Micro Engineering A/S

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

This paper presents a method for fabrication of an all-metal atomic force microscope probe (tip, cantilever and support) for optical read-out, using a combination of silicon micro-machining and electroforming. The paper describes the entire fabrication process for a nickel AFM-probe. In addition the first measurements with the new probe are presented

Original language	English
Title of host publication	Proceedings of Transducers 97
Volume	1
Place of Publication	Chicago
Publisher	IEEE
Publication date	1997
Pages	463-466
ISBN (Print)	0-7803-3829-4
DOIs	https://doi.org/10.1109/SENSOR.1997.613686
Publication status	Published - 1997
Event	International Conference on Solid-state Sensors and Actuators (Transducers 1997) - Chicago,IL, United States Duration: 16 Jun 1997 → 19 Jun 1997

Conference

Conference	International Conference on Solid-state Sensors and Actuators (Transducers 1997)
Country/Territory	United States
City	Chicago,IL
Period	16/06/1997 → 19/06/1997

Bibliographical note

Copyright: 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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title = "Fabrication of an all-metal atomic force microscope probe",

abstract = "This paper presents a method for fabrication of an all-metal atomic force microscope probe (tip, cantilever and support) for optical read-out, using a combination of silicon micro-machining and electroforming. The paper describes the entire fabrication process for a nickel AFM-probe. In addition the first measurements with the new probe are presented",

author = "Rasmussen, \{Jan Pihl\} and Tang, \{Peter Torben\} and Ole Hansen and Per M{\o}ller and Curt Sander",

note = "Copyright: 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; International Conference on Solid-state Sensors and Actuators (Transducers 1997), Transducers '97 ; Conference date: 16-06-1997 Through 19-06-1997",

year = "1997",

doi = "10.1109/SENSOR.1997.613686",

language = "English",

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booktitle = "Proceedings of Transducers 97",

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AU - Rasmussen, Jan Pihl

AU - Tang, Peter Torben

AU - Hansen, Ole

AU - Møller, Per

AU - Sander, Curt

N1 - Copyright: 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

PY - 1997

Y1 - 1997

N2 - This paper presents a method for fabrication of an all-metal atomic force microscope probe (tip, cantilever and support) for optical read-out, using a combination of silicon micro-machining and electroforming. The paper describes the entire fabrication process for a nickel AFM-probe. In addition the first measurements with the new probe are presented

AB - This paper presents a method for fabrication of an all-metal atomic force microscope probe (tip, cantilever and support) for optical read-out, using a combination of silicon micro-machining and electroforming. The paper describes the entire fabrication process for a nickel AFM-probe. In addition the first measurements with the new probe are presented

U2 - 10.1109/SENSOR.1997.613686

DO - 10.1109/SENSOR.1997.613686

M3 - Article in proceedings

SN - 0-7803-3829-4

VL - 1

SP - 463

EP - 466

BT - Proceedings of Transducers 97

PB - IEEE

CY - Chicago

T2 - International Conference on Solid-state Sensors and Actuators (Transducers 1997)

Y2 - 16 June 1997 through 19 June 1997

ER -

Fabrication of an all-metal atomic force microscope probe

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