Fabrication of an all-metal atomic force microscope probe

Jan Pihl Rasmussen, Peter Torben Tang, Ole Hansen, Per Møller, Curt Sander

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    444 Downloads (Pure)

    Abstract

    This paper presents a method for fabrication of an all-metal atomic force microscope probe (tip, cantilever and support) for optical read-out, using a combination of silicon micro-machining and electroforming. The paper describes the entire fabrication process for a nickel AFM-probe. In addition the first measurements with the new probe are presented
    Original languageEnglish
    Title of host publicationProceedings of Transducers 97
    Volume1
    Place of PublicationChicago
    PublisherIEEE
    Publication date1997
    Pages463-466
    ISBN (Print)0-7803-3829-4
    DOIs
    Publication statusPublished - 1997
    EventInternational Conference on Solid-state Sensors and Actuators (Transducers 1997) - Chicago,IL, United States
    Duration: 16 Jun 199719 Jun 1997

    Conference

    ConferenceInternational Conference on Solid-state Sensors and Actuators (Transducers 1997)
    CountryUnited States
    CityChicago,IL
    Period16/06/199719/06/1997

    Bibliographical note

    Copyright: 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

    Cite this

    Rasmussen, J. P., Tang, P. T., Hansen, O., Møller, P., & Sander, C. (1997). Fabrication of an all-metal atomic force microscope probe. In Proceedings of Transducers 97 (Vol. 1, pp. 463-466). IEEE. https://doi.org/10.1109/SENSOR.1997.613686