Fabrication of a thin-film adaptive electrostatic phase plate

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

Original language	English
Publication date	2023
Number of pages	2
Publication status	Published - 2023
Event	2023 Micro and Nano Engineering Conference - Mercure Hotel MOA Berlin, Berlin, Germany Duration: 25 Sept 2023 → 28 Sept 2023 https://mne-2023.org/

Conference	2023 Micro and Nano Engineering Conference
Location	Mercure Hotel MOA Berlin
Country/Territory	Germany
City	Berlin
Period	25/09/2023 → 28/09/2023
Internet address	https://mne-2023.org/

OpenUrl availability

@conference{24eff100a3ff4b86b94095c4ab82de09,

title = "Fabrication of a thin-film adaptive electrostatic phase plate",

author = "Mathias Adelmark and Ada-Ioana Bunea and Marco Beleggia and Andrei Lavrinenko and Rafael Taboryski",

year = "2023",

language = "English",

note = "2023 Micro and Nano Engineering Conference, MNE 2023 ; Conference date: 25-09-2023 Through 28-09-2023",

url = "https://mne-2023.org/",

}