Fabrication of a Field Effect Transistor by non-contact AFM oxidation

Montserrat Gomez, J.V. Anguita, F. Garcia, R. Garcia

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Scanning Probe Microscopy, Sensors and Nanostructures
    Publication date2002
    Publication statusPublished - 2002

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