Fabrication of 3D nano/microelectrodes via two-photon-polymerization

Mohammed Al- Abaddi, Luigi Sasso, Maria Dimaki, Winnie E. Svendsen, Johann-Peter Reithmaier, Olaf Kruger, Uwe Zeitner, Martin Hoffmann, Martin Stelzle Dieter Kern

    Research output: Contribution to journalJournal articlepeer-review

    Abstract

    The integration of two-photon polymerization technology with standard microfabrication techniques is imperative for the use of this tool in micro- and nanotechnology and especially for the future commercialization of the technology. In this work, we report a novel method for the fabrication of 3D polymeric structures via a two-photon polymerization based system. The method consists of combining a two-photon polymerization system with conventional photolithography techniques in order to create 3D polymer electrodes. The functionality of the final structures was confirmed by electrochemical characterization techniques.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume98
    Pages (from-to)378-381
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2012
    Event37th International Conference on Micro and Nano Engineering - Berlin, Germany
    Duration: 19 Sep 201123 Sep 2011
    Conference number: 37
    http://www.mne-conf.org/GENERAL/index.php

    Conference

    Conference37th International Conference on Micro and Nano Engineering
    Number37
    Country/TerritoryGermany
    CityBerlin
    Period19/09/201123/09/2011
    Internet address

    Keywords

    • Two-photon polymerization
    • Micro-fabrication
    • Three-dimensional Micro/Nanostructures
    • 3D Electrodes

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