Fabrication of 3D nano/microelectrodes via two-photon-polymerization

Mohammed Al- Abaddi; Luigi Sasso; Maria Dimaki; Winnie E. Svendsen; Johann-Peter Reithmaier, Olaf Kruger, Uwe Zeitner, Martin Hoffmann, Martin Stelzle Dieter Kern

doi:10.1016/j.mee.2012.07.015

Fabrication of 3D nano/microelectrodes via two-photon-polymerization

Mohammed Al- Abaddi, Luigi Sasso, Maria Dimaki, Winnie E. Svendsen, Johann-Peter Reithmaier, Olaf Kruger, Uwe Zeitner, Martin Hoffmann, Martin Stelzle Dieter Kern

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

The integration of two-photon polymerization technology with standard microfabrication techniques is imperative for the use of this tool in micro- and nanotechnology and especially for the future commercialization of the technology. In this work, we report a novel method for the fabrication of 3D polymeric structures via a two-photon polymerization based system. The method consists of combining a two-photon polymerization system with conventional photolithography techniques in order to create 3D polymer electrodes. The functionality of the final structures was confirmed by electrochemical characterization techniques.

Original language	English
Journal	Microelectronic Engineering
Volume	98
Pages (from-to)	378-381
ISSN	0167-9317
DOIs	https://doi.org/10.1016/j.mee.2012.07.015
Publication status	Published - 2012
Event	37th International Conference on Micro and Nano Engineering - Berlin, Germany Duration: 19 Sept 2011 → 23 Sept 2011 Conference number: 37 http://www.mne-conf.org/GENERAL/index.php

Conference

Conference	37th International Conference on Micro and Nano Engineering
Number	37
Country/Territory	Germany
City	Berlin
Period	19/09/2011 → 23/09/2011
Internet address	http://www.mne-conf.org/GENERAL/index.php

Keywords

Two-photon polymerization
Micro-fabrication
Three-dimensional Micro/Nanostructures
3D Electrodes

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10.1016/j.mee.2012.07.015

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title = "Fabrication of 3D nano/microelectrodes via two-photon-polymerization",

abstract = "The integration of two-photon polymerization technology with standard microfabrication techniques is imperative for the use of this tool in micro- and nanotechnology and especially for the future commercialization of the technology. In this work, we report a novel method for the fabrication of 3D polymeric structures via a two-photon polymerization based system. The method consists of combining a two-photon polymerization system with conventional photolithography techniques in order to create 3D polymer electrodes. The functionality of the final structures was confirmed by electrochemical characterization techniques.",

keywords = "Two-photon polymerization, Micro-fabrication, Three-dimensional Micro/Nanostructures, 3D Electrodes",

author = "Abaddi, {Mohammed Al-} and Luigi Sasso and Maria Dimaki and Svendsen, {Winnie E.} and {Dieter Kern}, {Johann-Peter Reithmaier, Olaf Kruger, Uwe Zeitner, Martin Hoffmann, Martin Stelzle}",

year = "2012",

doi = "10.1016/j.mee.2012.07.015",

language = "English",

volume = "98",

pages = "378--381",

journal = "Microelectronic Engineering",

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note = "37th International Conference on Micro and Nano Engineering, MNE 2011 ; Conference date: 19-09-2011 Through 23-09-2011",

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TY - JOUR

T1 - Fabrication of 3D nano/microelectrodes via two-photon-polymerization

AU - Abaddi, Mohammed Al-

AU - Sasso, Luigi

AU - Dimaki, Maria

AU - Svendsen, Winnie E.

AU - Dieter Kern, Johann-Peter Reithmaier, Olaf Kruger, Uwe Zeitner, Martin Hoffmann, Martin Stelzle

N1 - Conference code: 37

PY - 2012

Y1 - 2012

N2 - The integration of two-photon polymerization technology with standard microfabrication techniques is imperative for the use of this tool in micro- and nanotechnology and especially for the future commercialization of the technology. In this work, we report a novel method for the fabrication of 3D polymeric structures via a two-photon polymerization based system. The method consists of combining a two-photon polymerization system with conventional photolithography techniques in order to create 3D polymer electrodes. The functionality of the final structures was confirmed by electrochemical characterization techniques.

AB - The integration of two-photon polymerization technology with standard microfabrication techniques is imperative for the use of this tool in micro- and nanotechnology and especially for the future commercialization of the technology. In this work, we report a novel method for the fabrication of 3D polymeric structures via a two-photon polymerization based system. The method consists of combining a two-photon polymerization system with conventional photolithography techniques in order to create 3D polymer electrodes. The functionality of the final structures was confirmed by electrochemical characterization techniques.

KW - Two-photon polymerization

KW - Micro-fabrication

KW - Three-dimensional Micro/Nanostructures

KW - 3D Electrodes

U2 - 10.1016/j.mee.2012.07.015

DO - 10.1016/j.mee.2012.07.015

M3 - Journal article

SN - 0167-9317

VL - 98

SP - 378

EP - 381

JO - Microelectronic Engineering

JF - Microelectronic Engineering

T2 - 37th International Conference on Micro and Nano Engineering

Y2 - 19 September 2011 through 23 September 2011

ER -

Fabrication of 3D nano/microelectrodes via two-photon-polymerization

Abstract

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Keywords

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