Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies

Research output: Contribution to conference › Paper › Research

Original language	English
Publication date	2006
Publication status	Published - 2006
Event	IMEMS conference - Duration: 1 Jan 2006 → …

Conference	IMEMS conference
Period	01/01/2006 → …

OpenUrl availability

@conference{5db0ec62bbd24c3697c6623136736fce,

title = "Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies",

author = "F. Romanato and L. Businaro and M. Tormen and F. Perennes and B. Marmiroli and S{\o}ren Balslev and \{Di Fabrizio\}, E.",

year = "2006",

language = "English",

note = "IMEMS conference ; Conference date: 01-01-2006",

}