Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies

F. Romanato; L. Businaro; M. Tormen; F. Perennes; B. Marmiroli; Søren Balslev; E. Di Fabrizio

Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies

F. Romanato (Invited author), L. Businaro (Invited author), M. Tormen (Invited author), F. Perennes (Invited author), B. Marmiroli (Invited author), Søren Balslev (Invited author), E. Di Fabrizio (Invited author)

Research output: Contribution to conference › Paper › Research

Original language	English
Publication date	2006
Publication status	Published - 2006
Event	IMEMS conference - Duration: 1 Jan 2006 → …

Conference

Conference	IMEMS conference
Period	01/01/2006 → …

Cite this

@conference{5db0ec62bbd24c3697c6623136736fce,

title = "Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies",

author = "F. Romanato and L. Businaro and M. Tormen and F. Perennes and B. Marmiroli and S{\o}ren Balslev and {Di Fabrizio}, E.",

year = "2006",

language = "English",

note = "IMEMS conference ; Conference date: 01-01-2006",

}

Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies. / Romanato, F. (Invited author); Businaro, L. (Invited author); Tormen, M. (Invited author); Perennes, F. (Invited author); Marmiroli, B. (Invited author); Balslev, Søren (Invited author); Di Fabrizio, E. (Invited author).

2006. Paper presented at IMEMS conference.

Research output: Contribution to conference › Paper › Research