Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies

F. Romanato (Invited author), L. Businaro (Invited author), M. Tormen (Invited author), F. Perennes (Invited author), B. Marmiroli (Invited author), Søren Balslev (Invited author), E. Di Fabrizio (Invited author)

    Research output: Contribution to conferencePaperResearch

    Original languageEnglish
    Publication date2006
    Publication statusPublished - 2006
    EventIMEMS conference -
    Duration: 1 Jan 2006 → …

    Conference

    ConferenceIMEMS conference
    Period01/01/2006 → …

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