Fabrication of 3D Air-core MEMS Inductors

Hoà Lê Thanh, Io Mizushima, Peter Torben Tang, Ziwei Ouyang, Flemming Jensen, Anpan Han

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2016
Publication statusPublished - 2016
Event42nd International conference on Micro and Nano Engineering - Vienna, Austria
Duration: 19 Sep 201623 Sep 2016
Conference number: 42

Conference

Conference42nd International conference on Micro and Nano Engineering
Number42
CountryAustria
CityVienna
Period19/09/201623/09/2016

Keywords

  • Inductor
  • Through-silicon vias
  • Electroplating
  • atomic layer deposition
  • Deep reactive ion etching

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