Fabrication of 3D Air-core MEMS Inductors

Hoà Lê Thanh, Io Mizushima, Peter Torben Tang, Ziwei Ouyang, Flemming Jensen, Anpan Han

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    235 Downloads (Pure)
    Original languageEnglish
    Publication date2016
    Publication statusPublished - 2016
    Event42nd International conference on Micro and Nano Engineering - Vienna, Austria
    Duration: 19 Sep 201623 Sep 2016
    Conference number: 42

    Conference

    Conference42nd International conference on Micro and Nano Engineering
    Number42
    Country/TerritoryAustria
    CityVienna
    Period19/09/201623/09/2016

    Keywords

    • Inductor
    • Through-silicon vias
    • Electroplating
    • atomic layer deposition
    • Deep reactive ion etching

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