Fabrication of 3D Air-core MEMS Inductors

Hoà Lê Thanh, Io Mizushima, Peter Torben Tang, Ziwei Ouyang, Flemming Jensen, Anpan Han

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2016
Publication status	Published - 2016
Event	42nd International conference on Micro and Nano Engineering - Vienna, Austria Duration: 19 Sept 2016 → 23 Sept 2016 Conference number: 42

Conference	42nd International conference on Micro and Nano Engineering
Number	42
Country/Territory	Austria
City	Vienna
Period	19/09/2016 → 23/09/2016

Keywords

@conference{3cf02b00cfc24606860bd490de10c1ba,

title = "Fabrication of 3D Air-core MEMS Inductors",

keywords = "Inductor, Through-silicon vias, Electroplating, atomic layer deposition, Deep reactive ion etching",

author = "{L{\^e} Thanh}, Ho{\`a} and Io Mizushima and Tang, {Peter Torben} and Ziwei Ouyang and Flemming Jensen and Anpan Han",

year = "2016",

language = "English",

note = "42nd International conference on Micro and Nano Engineering, MNE 2016 ; Conference date: 19-09-2016 Through 23-09-2016",

}

TY - ABST

T1 - Fabrication of 3D Air-core MEMS Inductors

AU - Lê Thanh, Hoà

AU - Mizushima, Io

AU - Tang, Peter Torben

AU - Ouyang, Ziwei

AU - Jensen, Flemming

AU - Han, Anpan

N1 - Conference code: 42

PY - 2016

Y1 - 2016

KW - Inductor

KW - Through-silicon vias

KW - Electroplating

KW - atomic layer deposition

KW - Deep reactive ion etching

M3 - Conference abstract for conference

T2 - 42nd International conference on Micro and Nano Engineering

Y2 - 19 September 2016 through 23 September 2016

ER -