Fabrication and Process Optimization of Wafer-scale Silicon Nanopillar SERS Substates

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Original language	English
Publication date	2014
Number of pages	1
Publication status	Published - 2014
Event	40th International Conference on Micro and Nano Engineering - Lausanne, Switzerland Duration: 22 Sept 2014 → 26 Sept 2014 Conference number: 40 http://www.mne2014.org/

Conference	40th International Conference on Micro and Nano Engineering
Number	40
Country/Territory	Switzerland
City	Lausanne
Period	22/09/2014 → 26/09/2014
Internet address	http://www.mne2014.org/

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@conference{035d64b612594e4eb2d05fb63dfc5cf8,

title = "Fabrication and Process Optimization of Wafer-scale Silicon Nanopillar SERS Substates",

author = "Kaiyu Wu and Schmidt, \{Michael Stenb{\ae}k\} and Tomas Rindzevicius and Anja Boisen",

year = "2014",

language = "English",

note = "40th International Conference on Micro and Nano Engineering, MNE 2014 ; Conference date: 22-09-2014 Through 26-09-2014",

url = "http://www.mne2014.org/",

}