Fabrication and Process Optimization of Wafer-scale Silicon Nanopillar SERS Substates

Kaiyu Wu, Michael Stenbæk Schmidt, Tomas Rindzevicius, Anja Boisen

    Research output: Contribution to conferencePosterResearchpeer-review

    280 Downloads (Pure)
    Original languageEnglish
    Publication date2014
    Number of pages1
    Publication statusPublished - 2014
    Event40th International Conference on Micro and Nano Engineering - Lausanne, Switzerland
    Duration: 22 Sept 201426 Sept 2014
    Conference number: 40
    http://www.mne2014.org/

    Conference

    Conference40th International Conference on Micro and Nano Engineering
    Number40
    Country/TerritorySwitzerland
    CityLausanne
    Period22/09/201426/09/2014
    Internet address

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